20-year environmental temperature and humidity control solution provider
Product Application:
It is suitable for storing silicon wafers and wafer boxes in the semiconductor front-end single-crystal silicon process, preventing the re-entrainment of particles and fogging phenomena on the silicon wafers. Since most storage cabinets or nitrogen tanks are designed as fully enclosed environments, they only control humidity and oxygen content concentration, and do not have self-cleaning functions. Therefore, a large amount of dust is likely to accumulate inside, and this dust is very likely to adhere to the stored items. Xinxong Electrical Clean Nitrogen Tank is suitable for storing items that require low-humidity preservation while also needing to avoid dust contamination.
Relevant technical indicators:
1) Cleanliness level
Professional and efficient clean filtration device. The filter screen is made of imported ultra-fine glass fiber, ensuring that the nitrogen gas cabinet inside is at CLASS 10 - 100 level / 1000 level (10 levels generally refer to an empty cabinet or when a fixed number of wafer boxes are placed on each layer, the cleanliness can reach the required level of no more than 10 particles @ 0.3um & no more than 20 particles @ 0.2um per cubic foot).
2) TDH Experiment
The silicon wafers that have been stored in the clean nitrogen tank and dried for 2 hours must not have any abnormal or excessive return particles (the total number of returned particles after sampling and testing shall be compared with the original number of particles on the silicon wafers and shall be ≤ 10 pieces (including 0.2um and 0.3um)).
3) Drying rate reduction
The dehumidification performance can reach below 5%. When the cabinet is empty or a fixed number of wafer boxes are placed on each layer, and the nitrogen gas flow rate is no more than 70L/M, the time required for the humidity to drop from 50% to 10% is no more than 30 minutes.
4) Imported dust-free fan: Utilizes imported FFU fans specifically designed for cleanrooms, with surface air velocity ranging from 0.3 to 0.45 meters per second;
5) Measurement of static residual value for Xinsong Electrical's fully functional clean nitrogen storage cabinet (optional)
The silicon wafer boxes placed in the clean nitrogen tank must be sampled and tested for static electricity values at specific points after being dried for 2 hours. The values must be less than or equal to 1 kv.
6) Uniformity of air velocity inside the cabinet
The nitrogen gas tank is completely free of any dead corners and contains nitrogen. A wind speed measuring instrument can be used to measure the wind speed at each point where the silicon wafers are placed inside. There should be no significant differences.
7) Temperature and humidity display and record management.
Temperature and humidity display monitoring: It can conduct 24-hour uninterrupted monitoring of temperature and humidity. When the clean cabinet is completely closed, the humidity should not fluctuate by more than ±5%RH.
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